The incident occurred during maintenance on a device that uses X-ray fluorescence to measure the thickness of chemicals applied to semiconductor wafers.
The workers received doses that exceeded national annual limits, with one individual exposed to 15 mSv and the other to 130 mSv.
The interlock, which was supposed to cut off power to the X-ray tube when a safety shield was removed, had been improperly wired.
Samsung is facing a fine of ₩10.5 million for two violations, despite the significant health risks posed to the workers.
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